Semiconductor integrated circuit device

ABSTRACT

Prior known static random access memory (SRAM) cells are required that a diffusion layer be bent into a key-like shape in order to make electrical contact with a substrate with a P-type well region formed therein, which would result in a decrease in asymmetry leading to occurrence of a problem as to the difficulty in micro-patterning. To avoid this problem, the P-type well region in which an inverter making up an SRAM cell is formed is subdivided into two portions, which are disposed on the opposite sides of an N-type well region NW 1  and are formed so that a diffusion layer forming a transistor has no curvature while causing the layout direction to run in a direction parallel to well boundary lines and bit lines. At intermediate locations of an array, regions for use in supplying power to the substrate are formed in parallel to word lines in such a manner that one regions is provided per group of thirty two memory cell rows or sixty four cell rows.

This application is a Continuation of application Ser. No. 11/042,172,filed Jan. 26, 2005 (now allowed), which in turn is a Continuation ofapplication Ser. No. 10/606,954, filed Jun. 27, 2003 (now abandoned),and which in turn is a Continuation of application Ser. No. 09/565,535,filed May 5, 2000 (now U.S. Pat. No. 6,677,649); and the entiredisclosures of which are hereby incorporated by reference.

BACKGROUND OF THE INVENTION

The present invention relates generally to semiconductor integratedcircuit devices and, more particularly, to layout schemes of staticrandom access memory (SRAM) cells. The invention also relates tosemiconductor memory devices using such cells.

One-port SRAM cells with complementary metal oxide semiconductor (CMOS)configurations are typically designed so that each cell consistsessentially of six separate transistors. An exemplary layout of suchcells has been disclosed, for example, in JP-A-10-178110 (laid open onJun. 30, 1998).

In the previously known SRAM cell layout, a semiconductive well regionof P type conductivity with inverters formed therein is subdivided intoto subregions, which are disposed on the opposite sides of an N-typewell region while permitting a well boundary line to extend in adirection parallel to the bit lines.

The quest for higher integration and ultra-fine patterning techniques inmodern memory devices requires an optical exposure apparatus orequipment to decrease the wave length of the beams used therein. To thisend, the equipment is designed to employ exposure beams of shorterwavelengths, which have advanced from G line to I line, and then furtherto excimer lasers. Unfortunately, the requirements for micro-patterningarchitectures have grown more rapidly than technological advance in thetrend of shortening wavelengths in such equipment. In recent years, ithas been strictly required that micropatterning be done with the minimumdevice-feature length that shrinks to less than or equal to thewavelength of the exposure beam used. This minimum feature lengthshrinkage would result in a layout of IC components—particularly, memorycells—becoming more complicated in planar shape, which necessitates theuse of irregular polygonal layout patterns including key-shapedcomponents, in order to achieve the intended configuration of an on-chipcircuitry with enhanced accuracy. This makes it impossible, or at leastvery difficult, to microfabricate ultrafine layout patterns whiledisadvantageously serving as the cause of the destruction of thesymmetry of memory cells.

Regrettably, the prior art approach is associated with a need to curveor bend a diffusion layer into a complicated key-like shape for thepurpose of making electrical contact with a substrate of the P-type wellregion. Thus, the prior art suffers from the problem of the degradationof the symmetrization of the cell layout pattern, making the successfulachievement of microfabrication architectures for higher integrationdensities difficult.

SUMMARY OF THE INVENTION

In accordance with one aspect of the present invention, a semiconductordevice is provided which comprises a first inverter including a firstN-channel metal oxide semiconductor MOS transistor, and a first channelMOS transistor, a second inverter including a second N-channel MOStransistor and a second P-channel MOS transistor with an input terminalbeing connected to an output terminal of the first inverter and with anoutput terminal being connected to an input terminal of said firstinverter, a third N-channel MOS transistor having a source connected tothe output terminal of said first inverter, a drain connected to a firstbit line, and also a gate connected to a word line, and a fourthN-channel MOS transistor having a source connected to the outputterminal of said second inverter, a drain connected to a second bitline, and a gate connected to a word line, wherein the first and thirdN-channel MOS transistors are formed in a first P-type well region,wherein the diffusion layer has no curved or bent portions, whileletting the direction of the layout be parallel to the boundary withrespect to the first N-well region with the first and second P-channelMOS transistors formed therein, and wherein said second and fourthN-channel MOS transistors are formed in the second P-type well region,whose diffusion layer has no bent portions, while letting the layoutdirection be parallel to the boundary with respect to the first N-wellregion with the first and second P-channel MOS transistors formedtherein.

The diffusion layer is arranged to have its outer shape, which mainlyconsists of straight line segments including the longest straight lineportion, which lies parallel to the boundary with respect to the firstN-well region with the first and second P-channel MOS transistors formedtherein, and simultaneously in the case of defining a straight lineacting as the center line extending parallel to such a boundary, thelongest line portion is in linear symmetry with said center line; thesecond and fourth N-channel MOS transistors are formed in the secondP-well region, whose diffusion layer is mainly arranged by straight linesegments including its longest straight line portion that is parallel tothe boundary with respect to the first N-well region with the first andsecond P-channel MOS transistors formed therein while allowing, whendefining a straight line for use as the center line extending parallelto such a boundary, the line portion to be linearly symmetrical to thecenter line. At this time, in the case of employing the linearsymmetrization scheme, complete linear symmetry will not always berequired. Alternatively, slight nonsymmetry may also be permissible on acase-by-case basis. This nonsymmetry results from modifying thediffusion layer to have a shape in which its portions on the right andleft sides of the center line are substantially the same in area as eachother, by way of example.

In accordance with another aspect of this invention, a firstpolycrystalline silicon lead layer for use as the gate of said thirdN-channel MOS transistor and a second polycrystalline silicon lead layerfor use as the gate of said first P-channel MOS transistor, and also asthe gate of said first N-channel MOS transistor, are disposed inparallel to each other, wherein a third polycrystalline silicon leadlayer for use as the gate of said fourth N-channel MOS transistor, and afourth polycrystal-line silicon lead layer for use as the gate of saidsecond N-channel MOS transistor, and also as the gate of said secondP-channel MOS transistor are disposed in parallel to each other, andwherein the first and third polycrystalline silicon lead layers areconnected via a contact to a second layer which serves as a metal leadlayer constituting the word lines.

In accordance with another aspect of the invention, the input terminalof said first inverter and the output terminal of said second invertermay be electrically connected together at a contact, whereas the inputterminal of said second inverter and the output terminal of said firstinverter are electrically connected together at a contact.

In accordance with yet another aspect of the invention, a power supplyline connected to the first and second bit lines, the sources of saidfirst and second P-channel MOS transistors, and a ground line connectedto the sources of said first and second N-channel MOS transistors may beformed of a third layer serving as a metal lead layer lying parallel toa diffusion layer.

In accordance with a still another aspect of the invention, the firstbit line formed of said third layer serving as a metal lead layer may bearranged so that it is between a power supply line formed of said thirdlayer serving as a lead layer and a ground line as connected to thesource of said first N-channel MOS transistor formed of said third layerserving as a metal lead layer whereas the second bit line formed of saidthird layer serving as a metal lead layer is between a power supply lineformed of said third layer serving as a metal lead layer and a groundline as connected to the source of said second N-channel MOS transistorformed of said third layer serving as a metal lead layer.

In accordance with another aspect of the invention, the first and secondbit lines and a power supply line connected to the sources of said firstand second P-channel MOS transistors may be formed of a second layerserving as a metal lead layer, wherein word lines are formed of a thirdlayer of metal lead layer, and wherein a ground line connected to thesources of said first and second N-channel MOS transistors is formed ofthe third layer and second layer serving as a metal lead layer.

In accordance with a still another aspect of the invention, memory cellsare laid out into the form of an array, wherein contacts to a substrateof a P-type well region and a contact to a substrate of an N-type wellregion are linearly disposed within the array and at upper and lowerportions of the array in a direction parallel to the word lines.Although the above is an example which causes two separate P-wellregions to be disposed on the opposite sides of an N-well region, twoN-well regions may be disposed on the opposite sides of a P-well regionwhen the need arises.

In accordance with yet another aspect of the invention, a semiconductordevice is provided which comprises a plurality of memory arrays, eachincluding an array of memory cells having at least an N-type well regionand a P-type well region, and at least one intermediate region betweenthe memory arrays, wherein the N-type well region and P-type well regiondefine therebetween a boundary with at least one straight line portion,and wherein a diffusion layer is formed in both the N-type well regionand the P-type well region to have a planar shape of either (1) arectangle having long sides extending parallel to said straight lineportion, or (2) a shape resulting from letting a plurality of rectangleshaving long sides extending parallel to the straight line portion becombined together via respective short sides thereof; or alternatively,

(1) a rectangle having long sides parallel to said straight lineportion, or (2) a shape resulting from letting a plurality of rectangleshaving long sides parallel to said straight line portion be combinedtogether, causing them to extend in the direction of the straight line.

At least in the memory array regions, bit lines are laid out in adirection parallel to the straight line portion, whereas word lines aredisposed in a direction perpendicular to the straight portion.Preferably, in the intermediate region, at least one type of electricallead is railed in a direction at right angles to the straight portion,and a lead (e.g. contact) is also formed with the purpose of makingelectrical contact between a power supply voltage lead and the diffusionlayer as formed in the N-well region or P-well region. This lead mayinclude a power supply lead, ground lead, or other potential leads.

The invention is particularly useful for those semiconductor memorydevices having static RAM memory cells each consisting essentially ofsix separate transistors.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram showing an SRAM cell in accordance with Embodiment 1of the present invention, for explaining a layout pattern of thosecontacts for connection between MOS transistors and those for connectingbetween MOS transistors and metal lead layers.

FIG. 2 is a diagram showing a layout of via holes of SRAM cells forconnection between multilayered metal leads in accordance withEmbodiment 1 of this invention.

FIG. 3 is a diagram showing a layout of memory cells and theirassociated peripheral circuitry in accordance with Embodiment 2 of theinvention.

FIG. 4 is a diagram showing an SRAM cell in accordance with Embodiment 3of the invention, for explaining a layout of those contacts forconnection between MOS transistors and those for connection between MOStransistors and metal lead layers.

FIG. 5 is a diagram showing a layout of via holes of SRAM cells forconnection between multilayered metal leads in accordance withEmbodiment 3 of the invention.

FIG. 6 is a diagram showing an SRAM cell in accordance with Embodiment 4of the invention, for explaining a layout of those contacts forconnection between MOS transistors and those for connection between MOStransistors and metal lead layers.

FIG. 7 is a diagram showing a layout of via holes of SRAM cells forconnection between muitilayered metal leads in accordance withEmbodiment 3 of the invention.

FIG. 8 is a diagram showing an SRAM cell in accordance with Embodiment 5of the invention, for explaining a layout of those contacts forconnection between MOS transistors and those for connection between MOStransistors and metal lead layers.

FIG. 9 is a diagram showing a layout of via holes of SRAM cells forconnection between muitilayered metal leads in accordance withEmbodiment 5 of the invention.

FIG. 10 is a diagram showing an SRAM cell in accordance with Embodiment6 of the invention, for explaining a layout of those contacts forconnection between MOS transistors and those for connection between MOStransistors and metal lead layers.

FIG. 11 is a diagram showing a layout of via holes of SRAM cells forconnection between multilayered metal leads in accordance withEmbodiment 6 of the invention.

FIGS. 12 a to 12 f are diagrams illustrating in cross-section some ofmajor process steps in the manufacture of the semiconductor device inaccordance with Embodiment 6 of the invention.

FIG. 13 is a diagram showing an SRAM cell in accordance with Embodiment7 of the invention, for explaining a layout of those contacts forconnection between MOS transistors and those for connection between MOStransistors and metal lead layers.

FIG. 14 is a diagram showing a layout of via holes of SRAM cells for usein connecting between multilayered metal leads in accordance withEmbodiment 7 of the invention.

FIG. 15 is a diagram showing an SRAM cell in accordance with Embodiment8 of the invention, for explaining a layout of those contacts forconnection between MOS transistors and those for connection between MOStransistors and metal lead layers.

FIG. 16 is a diagram showing a layout of via holes of SRAM cells forconnection between multilayered metal leads in accordance withEmbodiment 8 of the invention.

FIG. 17 is a sectional view of a semiconductor device in accordance withEmbodiment 8 of the invention.

FIGS. 18 a to 18 f are diagrams illustrating in cross-section some ofmajor process steps in the manufacture of a semiconductor device inaccordance with Embodiment 9 of the invention.

FIGS. 19 a to 19 g are diagrams illustrating in cross-section some ofmajor process steps in the manufacture of a semiconductor device inaccordance with Embodiment 10 of the invention.

DETAILED DESCRIPTION OF EMBODIMENTS

Several preferred embodiments of the semiconductor memory device inaccordance with the present invention will be explained with referenceto the accompanying drawings below.

Embodiment 1

Referring to FIGS. 1 and 2, SRAM cell layout MC embodying the invention.FIG. 1 illustrates well regions and diffusion layers plus apolycrystalline silicon interconnect lead layer, as well as contacts,all of which are formed in or over a semiconductor substrate FIG. 2depicts a first layer serving as a metal lead layer, via holes 1, asecond layer serving as a metal lead layer, via holes 2, and a thirdlayer serving as a metal lead layer. Symbols used in FIGS. 1 and 2 areindicated at the lower part of FIG. 2.

An N-channel type MOS transistor TN1 formed in a P-type semiconductivewell region PW1 and a P-channel type MOS transistor-TP1 formed in anN-type well region NW1 constitute an inverter INV1. In addition, anN-channel MOS transistor TN2 formed in P-type well region PW2 and aP-channel MOS transistor TP2 formed in N-type well region NW1 constitutean inverter INV2.

An output node of the inverter INVL is electrically connected by acontact SC1 to an input node of the inverter INV2. An output of theinverter INV2 is electrically connected via a contact SC2 to an input ofthe inverter INV1.

An N-channel MOS transistor TN3 has a drain electrode connected to a bitline BL1, a source electrode connected to a drain of the N-channel MOStransistor TN1, and a gate electrode connected to a word line WD.Similarly, an N-channel MOS transistor TN4 has a drain electrodeconnected to a bit line BL2, a source electrode connected to a drain ofthe N-channel MOS transistor TN2, and a gate electrode connected to aword line WD.

The N-channel MOS transistor TN1 and the N-channel MOS transistor TN3are formed over a diffusion layer LN1, whereas the N-channel MOStransistor TN2 and the N-channel MOS transistor TN4 are formed over adiffusion layer LN2. The P-channel MOS transistor TP1 is formed over adiffusion layer LP1, whereas the P-channel MOS transistor TP2 is formedover a diffusion layer LP2.

As the diffusion layers (LN1, LN2, LP1, LP2) are straight lines with nocurved portions, any pattern correction at the folded portions is nolonger necessary, resulting in the balance between nodes being improved.In case the memory cells are laid out into the form of an array, thediffusion layers become four separate straight lines extending parallelto the bit lines (BL1, BL2).

In addition, a polycrystalline silicon interconnect lead layer FG3 to beused the gate electrode of the N-channel MOS transistor TN3 and apolycrystalline silicon lead layer FG4 to be used as the gate electrodeof the N-channel MOS transistor TN4 are connected to word lines WL,which are formed of the second metal lead layer in a vertical directionto the bit lines (BL1, BL2) A polycrystalline silicon interconnect leadlayer FG1 to be used as the gate electrode of the N-channel MOStransistor TN1 and the P-channel MOS transistor TP1 and apolycrystalline silicon interconnect lead layer FG2 to be used as thegate electrode of the N-channel MOS transistor TN2 and the P-channel MOStransistor TP2, plus the polycrystalline silicon lead layers (FG3, FG4),are disposed in parallel to the word lines.

The N-channel MOS transistor TN1 has its source electrode connected to aground potential line Vss1 that is formed of the third layer serving asa metal lead layer, whereas a source electrode of the N-channel MOStransistor TN2 is connected to a ground line Vss2 that is formed of thethird layer serving as a metal lead layer. In addition, sourceelectrodes of the P-channel MOS transistors (TP1, TP2) are connected toa power supply voltage line Vcc1 which is formed of the third layerserving as a metal lead layer.

The bit line BL1 is located midway between the power supply voltage lineVcc1 and ground line Vss1, whereas bit line BL2 is between the supplyvoltage line Vcc1 and ground line Vss2. This structure makes it possibleto reduce cross-couple noises occurring between bit lines, whichadvantageously lowers voltages while increasing operation speeds.

In addition, it is considered that, in case a contact is formed on an n⁻layer through the partial cutaway of side spacers during the etching ofcontact holes, a leakage current from the contact via the n⁻ layer tothe substrate may be produced. When a contact is formed for connectionbetween a polycrystalline silicon lead layer and a diffusion layer, thedistance between the diffusion layer LP2 and polycrystalline siliconlead layer FG1 should be greater than the length of a side spacer tothereby eliminate the formation of an n⁻ layer on the polycrystallinesilicon lead layer FG1 side of the diffusion layer LP2, which in turnmakes it possible to prevent a flow of leakage current.

Embodiment 2

Turning to FIG. 3, an exemplary case is shown where the memory cells MCof Embodiment 1 are laid out into the form of an array. Symbols usedherein are the same as those indicated at the lower part of FIG. 2.

The memory cells MC are organized into an array of 256 rows and 128columns, by way of example. In view of the fact that these memory cellsin Embodiment 1 are shorter in length in the longitudinal direction ofthe bit lines, the total length of the 256 rows of memory cells alongthe bit lines is shorter than that of prior art devices, thus increasingresultant operation speeds. Neighboring memory cells MC are disposed inlinear symmetry with respect to a “y” axis whereas upper and loweradjacent memory cells MC are in linear symmetry with an “x” axis. Inaddition, specified regions ST for use in supplying more than one powersupply voltage to the substrate are formed at the intermediate part ofthe array in such a manner that the regions ST extend parallel to wordlines WD. One example is that the regions ST are laid out in units of32-row groups. Another example is that regions ST are disposed in unitsof 64-row groups.

An electrical lead Vbn for supplying a voltage potential to the P-wellregions (PW1, PW2) and a lead Vbp for supplying a voltage to the N-wellregion NW1 are formed to lie parallel to word lines. The lead Vbn may becoupled to the ground potential Vss or, alternatively, any voltage maybe applied thereto which is potentially different from the ground Vss.The lead Vbp may be coupled to the power supply voltage Vcc or,alternatively, any voltages potentially different from the Vcc may beapplied thereto.

Note that in each region ST, a power supply voltage line Vcc forpotentially “reinforcing” a power supply voltage line Vcc1 is formed inparallel to word lines while, allowing a ground potential line Vss forpotentially reinforcing ground potentials (Vss1, Vss2) to be formed inparallel to the word lines.

Also note that the ground lines (Vss1, Vss2) are disposed in a directionperpendicular to the word lines WD, whereby upon selecting a single wordline a voltage potential is supplied from the pair of ground lines to arespective one of those memory cells operatively associated with thisselected word line so that any possible noises occurring at such voltagelines are reduced, thereby advantageously speeding an access operationwhile potentially reducing any voltages concerned.

Furthermore, the memory cells MC used are great in width in the wordline direction so that the layout design of sense amplifiers AMP is madeeasier, thereby avoiding the need to lay out one sense amplifier for twoadjacent columns of memory cells, which in turn makes it possible topermit one sense amplifier to be laid out at each column. Additionally,a word line driver circuit wddrv becomes fiat in layout as compared topreviously prior known ones.

Embodiment 3

FIGS. 4 and 5 show a SRAM cell layout MC2 in accordance with Embodiment3. Symbols as used in FIGS. 4-5 are the same as those in FIG. 2. Memorycell MC2 of Embodiment 3 is similar to the memory cell MC of Embodiment1, with the exception that, as compared to Embodiment 1, in which thediffusion layer (LN1, LN2) is formed into a “T”-like planar shape, whichresembles a Japanese battledore plate called “hagoita,” the diffusionlayer (LN3, LN4) of Embodiment 4 is of a rectangular shape, and thecontacts (SC1, SC2) are replaced with contacts (SC3, SC4) in the firstlayer serving as metal lead layers (M11, M12).

To attain stability, memory cells are typically designed so that thegate width of the N-channel MOS transistors (TN1, TN2) is one and a halftimes greater than that of the N-channel MOS transistors (TN3, TN4)However, in this case, the shape of the diffusion layers resembles aT-like planar shape, as shown in Embodiment 1, which in turn requiresextra techniques, including pattern correction procedures such asoptical proximity effect correction (OPC) processes. Additionally, thiswould result in the degradation of the balance between transistors. Incontrast, Embodiment 3 is such that the diffusion layers (LN3, LN4) aredesigned to have a rectangular shape whereby the micro-patterningrequired becomes easier while at the same time enabling an improvementin balance between transistors. Note, however, that the resultant gatewidth ratio becomes as large as 1.0 time, which in turn requires thatthe so-called cell ratio be increased by making different drivabilitiestherebetween. This is attainable by letting the N-channel MOStransistors (TN3, TN4) be greater in oxide film thickness than theN-channel MOS transistors (TN1, TN2), by increasing the gate lengththereof, or by increasing the threshold value, or by lowering theimpurity concentration of lightly-doped drain regions for relaxation ofelectric fields.

In addition, Embodiment 3 is arranged to employ a contact SC3 and afirst layer serving as a metal lead layer M11 in place of the contactSC1 used in Embodiment 1 for connection between the output of theinverter INVL and the input of the inverter INV2. With such anarrangement, any curved or bent contacts are no longer necessary,thereby avoiding the need for pattern correction (OPC) or the like.

Embodiment 4

FIGS. 6 and 7 show an SRAM cell layout MC3 in accordance with Embodiment4. The symbols used in FIGS. 6-7 are the same as those in FIG. 2. Memorycell MC3 of Embodiment 4 is similar to the memory cell MC2 of Embodiment3, except that the polycrystalline silicon lead layers (FG5, FG6, FG7,FG8) are designed to have a rectangular planar shape. With this cell,any bent/folded portions are absent, thus removing the need for anyadditional pattern correction procedures including OPC processes, whichin turn improves the balance between transistors.

Embodiment 5

FIGS. 8 and 9 show an SRAM cell layout MC4 in accordance with Embodiment5. An explanation of the symbols used in FIGS. 8 and 9 is given at thelower part of FIG. 8. Memory cell MC4 of Embodiment 5 is different inlead structure from the memory cell MC of Embodiment 1.

Bit lines (BL3, BL4) and power supply line Vcc2 are formed by the use ofa second layer serving as a metal lead layer. A word line WD1 and groundlines (Vss5, Vss6) are formed using a third layer serving as a metallead layer in a perpendicular direction to the bit lines. Ground lines(Vss3, Vss4) are formed using a fourth layer serving as a metal leadlayer in a direction parallel to the bit lines.

A global bit line GB is the electrical interconnect lead that is used inthe case that the bit lines are of a hierarchical configuration. Theglobal bit line GB and bit lines (BL3, BL4) are shielded by the thirdlayer serving as a metal lead layer, thus enabling the prevention of anypossible cross-couple noises. Additionally, the use of ground lines(Vss3, Vss4) makes it possible to prevent the occurrence of crosscouplenoises between global bit lines GB.

Embodiment 6

FIGS. 10 and 11 show an SRAM cell layout MC5 in accordance withembodiment 6. An explanation of the symbols used in FIGS. 10-11 is givenat lower part of FIG. 11. Memory cell MC5 of Embodiment 6 is differentfrom the memory cell MC of Embodiment 1 in the structure of theso-called three-layered contacts, each of which is for connectionbetween a gate electrode and its associated diffusion layer.

Although in Embodiment 1 a gate electrode is connected to a diffusionlayer via “L”-like contacts SC1 and SC2, Embodiment 6 is arranged sothat the gate electrode is connected to the diffusion layer via silicidein connect regions SS1 and SS2. This makes it unnecessary to bend orcurve the individual contact into the L-like shape in order to connectthe gate electrode to the diffusion layer, which in turn makes itpossible to provide “I”-like rectangular contacts SC5, SC6. Nofolded/bent portions are present in the contacts used, which eliminatesthe need for pattern correction (OPC).

FIGS. 12 a-12F show a practical example of the process steps which canbe used in manufacturing a device structure employing the connectregions SS1 and SS2, each for connection between a gate electrode and adiffusion layer associated therewith via silicide. Note here that FIGS.12 a-12 f are cross-sectional views, each indicating a profile as takenalong line A-A1 in FIG. 10, with its right side corresponding to theside “A” and with its left side corresponding to “A1.”

Fabricate a gate electrode FG made of a chosen polycrystalline siliconmaterial (see FIG. 12 a).

Form a heavily-doped diffusion layer PM of a specified conductivitytype-here, a P type (FIG. 12 b).

Form side spacers made of silicon nitride (SiN) by chemical vapordeposition (CVD) techniques on the side-walls of the resultant gateelectrode FG (FIG. 12 c).

Make use of a resist RG to etch away only one of the SiN side spacers,which resides on an active region side under a prespecified conditionthat enables etching treatment of a silicon nitride film and oxide filmat increased selectivity (FIG. 12 d).

Fabricate a heavily-doped P (P+) type diffusion—layer P+.

After having removed through etching a certain part of the oxide filmSiO that lies in the active region that is not covered by any overlyinggate electrode FG, deposit a high-melting-point metal such as refractorymetal including, but not limited to, cobalt (Co); then, anneal theresultant structure to thereby selectively form silicide on thepoly-silicon gate electrode and diffusion layer (FIG. 12 f). At thistime, a side-wall of the gate electrode and the diffusion layer areconnected together by this silicide.

Embodiment 7

FIGS. 13 and 14 show an SRAM cell layout MC6 in accordance withEmbodiment 7. An explanation of the symbols used in FIGS. 13-14 is thesame as that given at the lower part of FIG. 11. Memory cell MC6 ofEmbodiment 7 is similar to the memory cell MC5 of Embodiment 6, with thecontacts (SC5, SC6) being replaced with contacts (SC7, SC8) in the firstlayer serving as metal lead layers (M11, M12).

With Embodiment 7, all of the contacts used therein are capable of beingdesigned to have a square planar shape, thus avoiding the need forpattern correction (OPC).

Embodiment 8

FIGS. 15 and 16 show an SRAM cell layout MC7 in accordance withEmbodiment 8. An explanation of the symbols used in FIGS. 15-16 is givenat the lower part of FIG. 16. Memory cell MC7 of Embodiment 8 is similarto the memory cell MC of Embodiment 1, with the contacts (SC1, SC2)being replaced with local interconnect nodes (LI1, LI2), and also withthe word lines being modified in such a manner that these are formed inthe first layer serving as a metal lead layer rather than in the secondlayer serving as a metal lead layer while also modifying the bit lines,power supply, and ground lines from the third layer serving as a metallead layer to the second layer serving as a metal lead layer. FIG. 17depicts a sectional view taken along line A-B of FIGS. 15-16.

Embodiment 1 suffers from limitations, such as an inability to disposethe first layer of metal leads over the contacts SC1 and SC2, due to thefact that these contacts SC1 and SC2 are formed of the same layer as theremaining contacts used. In contrast, Embodiment 8 is specificallyarranged to employ the local interconnect nodes LI1 and LI2, formed in aseparate layer from the contacts, thus making it possible to dispose thefirst layer serving as a metal lead layer at the upper part, which inturn makes it possible to reduce by one the requisite number of metallead layers when compared to Embodiment 1.

Embodiment 9

A process flow of major steps in the manufacture of a three-layercontact section of Embodiment 9 is shown in FIGS. 18 a-18 f. Embodiment9 is an example of the process for fabrication of the three-layercontact section as used in Embodiments 1, 3-5 and 8.

Modern LSIs in recent years are typically designed so thatmicropatterning is done to form contact holes by high-selectivityetching techniques with a silicon nitride film, or else used as astopper to ensure that any unwanted over-etching occurs at filed oxidefilms, even when contacts are offset in position from diffusion layersand/or gate electrodes due to the presence of possible alignment errorsduring photolithographical patterning processes. In such cases, gateelectrodes are formed to have reduced electrical resistivities by theuse of the so-called silicide processes. It is possible to obtain theintended electrical conduction between a contact lying over a gateelectrode and a contact overlying a diffusion layer, even when the bothcontacts are fabricated at a time due to the fact that the contact holesrequired are fabricated after the completion of a procedure having thesteps of forming silicide through exposure of selected portionsoverlying diffusion layers and gate electrodes after having formed suchdiffusion layers, depositing thereover a silicon nitride film for use asan etching stopper, and then further depositing thereover an interlayerdielectric film. On the contrary, in the case of either thetraditionally widely employed polycide gate electrodes or the polymetalgate electrodes that have been developed and announced recently,residual portions of an insulative film such as an oxide film canoverlie gate electrodes thereby preventing the exposure of these gateelectrodes prior to deposition of a silicon nitride film acting as theetch stopper. Accordingly, whenever an attempt is made to form theintended contacts through the deposition of a silicon nitride filmthereover, the oxide film behaves to partly reside at the bottom of arespective one of those contacts overlying the gate electrodes, whichmakes it impossible, or at least very difficult to provide theelectrical conduction required. Embodiment 9 is for enabling theachievement of electrical conduction of such contacts overlying gateelectrodes by the previous removal of any silicon nitride film portionsoverlying gate electrodes at a specified part at which contact holeswill be defined.

An explanation will now be given of the process flow in the manufactureof Embodiment 9 with reference to FIGS. 18 a-18 f below.

After having fabricated a gate electrode and a diffusion layer P+,deposit a silicon nitride film SiN for use as an etch stopper (FIG. 18a). The gate electrode is a lamination of polycrystalline silicon PolySiand tungsten W, with an oxide film SiO being further multilayeredthereon as a protective film.

Remove by dry etching techniques a specified part of the silicon nitridefilm at locations for the definition of a contact hole overlying thegate electrode (FIG. 18 b).

Deposit a TEOS film and others by plasma CVD methods to thereby form aninterlayer dielectric film (FIG. 18 c).

Let a selected portion of the oxide film at a contact opening portion beetched away by high selective dry etching techniques (FIG. 18 d) Owingto such high selective etching, the silicon nitride film remains freefrom etch treatment and thus acts as a stopper. Since there is nostopper at the portion overlying the gate electrode from which thesilicon nitride film has been removed in advance, this portion will befully etched to the upper part of the gate electrode. This permitselectrical conduction to occur also on the gate electrode.

Remove the silicon nitride film by dry etching techniques (FIG. 18 e).

Deposit a chosen metal, such as tungsten in the resulting contact hole,thereby forming a buried plug (FIG. 18 f).

Embodiment 10

Turning to FIGS. 19 a-19 g, a process flow in the manufacture of thethree-layer contact section of Embodiment 10 is shown. Embodiment 10 isone example of the process for forming the three-layer contact sectionof Embodiments 1, 3-5 and 8.

A difference in the process flow of Embodiment 10 from that ofEmbodiment 9 is that more than one portion of the oxide film at aspecified location at which a contact hole is to be opened over the gateelectrode has been removed in advance prior to the deposition of asilicon nitride film to be used as the etch stopper.

The fabrication process flow of Embodiment 10 will be explained withreference to FIGS. 19 a-19 g below.

Fabricate a gate electrode and a diffusion layer P+ (FIG. 19 a). Thegate electrode is a lamination of polycrystalline silicon PolySi andtungsten W, with an oxide film SiO further stacked thereon as aprotective film.

Remove by dry etching techniques a specified part of the silicon nitridefilm at the location for the definition of a contact hole overlying thegate electrode, thus letting the gate electrode be exposed at its upperpart (FIG, 19 b).

Deposit a silicon nitride film SiN as an etch stopper (FIG. 19 c).

Deposit a TEOS film by plasma CVD methods to thereby form an interlayerdielectric film (FIG. 19 d).

Let a portion of the oxide film at the contact opening portion be etchedaway by high selective dry etching techniques (FIG. 19 e) Due to suchhigh selective etching, the silicon nitride film remains free frometching treatment and thus acts as the stopper.

Remove the silicon nitride film by dry etching techniques (FIG. 19 f) Acertain portion from which the oxide film overlying the gate electrodehas been removed prior to the deposition of the silicon nitride film isthus exposed at this time, which permits electrical conduction to occuralso in the gate electrode.

Deposit a chosen metal such as tungsten in the resultant contact hole,thereby forming a buried plug (FIG. 19 g).

In accordance with the embodiments stated above, any diffusion layersused therein are specifically designed to have a simplified planarshape, excluding unnecessarily complicated shapes, which may in turnfacilitate micro-patterning processes.

1. A semiconductor integrated circuit device comprising: first andsecond bit lines; a plurality of word lines; a plurality of first memorycells commonly connected to the first and second bit lines, each of thememory cells having a first inverter including a first N-channel MOStransistor and a first P-channel MOS transistor, a second inverterIncluding a second N-channel MOS transistor and a second P-channel MOStransistor with an input terminal of the second inverter being coupledto an output terminal of the first inverter and with an output terminalof the second inverter being coupled to an input terminal of the firstinverter, a third N-channel MOS transistor having a source/drain pathcoupled between the output terminal of the first inverter and the firstbit line, and a fourth N-channel MOS transistor having a source/drainpath coupled between the output terminal of the second inverter and thesecond bit line, a gate of each of the third and fourth N-channel MOStransistors being connected to one of the plurality of word lines; afirst P-type well region in which the first and third N-channel MOStransistors are formed and which is commonly formed among the pluralityof memory cells, a second P-type well region in which the second andfourth N-channel MOS transistors are formed and which is commonly formedamong the plurality of memory cells; an N-type well region in which thefirst and second P-channel MOS transistors are formed and which iscommonly formed among the plurality of memory cells, the N-type wellregion lying between the first and second P-type well regions; a firstwell contact provided to supply a first voltage to the first P-type wellregion; a second well contact provided to supply a second voltage to theN-type well region; and a third well contact provided to supply thefirst voltage to the second P-type well region, wherein the plurality offirst memory cells are formed in a first area, wherein the first,second, and third well contacts are formed in a second area, wherein thefirst P-type well region is continuously formed in the first and secondareas, wherein the second P-type well region is continuously formed inthe first and second areas, wherein the N-type well region iscontinuously formed in the first and second areas, wherein the firstP-type well region in the first area is supplied with the first voltagefrom the second area and the first area has no contacts to supply thefirst voltage to the first P-type well region, wherein the second P-typewell region in the first area is supplied with the first voltage fromthe second area and the first area has no contacts to supply the firstvoltage to the second P-type well region, and wherein the N-type wellregion In the first area is supplied with the second voltage from thesecond area and the first area has no contacts to supply the secondvoltage to the N-type well region.
 2. A semiconductor Integrated circuitdevice according to claim 1, further comprising: a plurality of secondmemory cells formed in a third area and commonly connected to the firstand second bit lines, wherein the second area is located between thefirst area and the third area, wherein the first P-type well region iscontinuously formed in the first, second, and third areas, wherein thesecond P-type well region is continuously formed in the first, second,and third areas, wherein the N-type well region are continuously formedin the first, second, and third areas, wherein the first P-type wellregion in the third area is supplied with the first voltage from thesecond area and the third area has no contacts to supply the firstvoltage to the first P-type well region, wherein the second P-type wellregion in the third area is supplied with the first voltage from thesecond area and the third area has no contacts to supply the firstvoltage to the second P-type well region, and wherein the N-type wellregion in the third area is supplied with the second voltage from thesecond area and the third area has no contacts to supply the secondvoltage to the N-type well region.
 3. A semiconductor integrated circuitdevice according to claim 1, further comprising: a first electrical leadconnected to the first and third well contacts and supplying the firstvoltage to the first and second P-type well regions; and a secondelectrical lead connected to the second well contact and supplying thesecond voltage to the N-type well regions.
 4. A semiconductor integratedcircuit device according to claim 3, wherein the first electrical leadextends in a direction parallel to the plurality of word lines, andwherein the second electrical lead extends in the direction parallel tothe plurality of word lines.
 5. A semiconductor Integrated circuitdevice according to claim 3, further comprising: a third electrical leadconnected to sources of the first N-channel MOS transistors In theplurality of first memory cells and extending in a direction parallel tothe first and second bit lines; a fourth electrical lead connected tosources of the first and second P-channel MOS transistors in theplurality of first memory cells and extending In the direction parallelto the first and second bit lines; a fifth electrical lead connected tosources of the second N-channel MOS transistors in the plurality offirst memory cells and extending in the direction parallel to the firstand second bit lines; a sixth electrical lead connected to the third andfifth electrical leads; and a seventh electrical lead connected to thefourth electrical lead, wherein the first, second, sixth, and seventhelectrical leads are formed in the second region.
 6. A semiconductorintegrated circuit device according to claim 3, further comprising: athird electrical lead connected to sources of the first N-channel MOStransistors in the plurality of first memory cells and extending in adirection parallel to the first and second bit lines; a fourthelectrical lead connected to sources of the first and second P-channelMOS transistors in the plurality of first memory cells and extending inthe direction parallel to the first and second bit lines; and a fifthelectrical lead connected to sources of the second N-channel MOStransistors in the plurality of first memory cells and extending in thedirection parallel to the first arid second bit lines.
 7. Asemiconductor integrated circuit device according to claim 1, furthercomprising: a first electrical lead connected to sources of the firstN-channel MOS transistors in the plurality of first memory cells andextending in a direction parallel to the first and second bit lines; asecond electrical lead connected to sources of the first and secondP-channel MOS transistors in the plurality of first memory cells andextending in the direction parallel to the first and second bit lines;and a third electrical lead connected to sources of the second N-channelMOS transistors in the plurality of first memory cells and extending inthe direction parallel to the first arid second bit lines.